EBOOK - Fundamental of Manufacturing Techniques for Microfabrication and Nanotechnology Volume 11 - Madou, Marc J


Manufacturing Techniques for Microfabrication and Nanotechnology consists of three parts and ten chapters.

In Part I, we review different forms of lithography, detailing those that differ most from the miniaturiza-tion processes used to fashion integrated circuits (ICs). In Part II we deal with material removal processes, and additive technologies are the focus of Part III. We review gas and vapor phase dry etching processes, including chemical, physical (purely mechanical), and chemical-physical (mostly chemical with some mechanical assist). In Part III we cover additive (forming) processes, where materials are added, usually in a selective man-ner, to a work piece or a device under construction. Physical vapor deposition processes (PVD) and chemical vapor deposition (CVD).
Note to the Reader: Manufacturing Techniques for Microfabrication and Nanotechnology was originally composed as part of a larger book that has since been broken up into three separate volumes. Manufacturing Techniques for Microfabrication and Nanotechnology represents the second volume in this set. The other two volumes include Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology and From MEMS to Bio-NEMS: Manufacturing Techniques and Applications. Cross-references to these books appear throughout the text and will be referred to as Volume I and Volume III, respectively.


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